LA3215C-UCC-CFT for the Supply of a Suite of Plasma Etcher and Plasma Deposition Tools, 4 Lots

Education Procurement Service (EPS)

Tenders are sought for the supply delivery, installation and commissioning of a suite of tools in 4 Lots for silicon-based and dielectric materials for University College Cork. The new plasma tools will enhance the capabilities at the Tyndall National Institute for the fabrication of semiconductor devices, especially silicon microelectronics and silicon MEMS, but also other materials such as germanium and silicon carbide. We invite proposals for the following lots; Lot 1 Plasma Etcher Silicon Dielectrics, advanced plasma etching system capable of etching for polysilicon poly-Si silicon dioxide SiO2 silicon nitride SiN thin films using medium high-density plasma processes. Lot 2 Plasma Etcher Metals Piezoelectrics, advanced plasma etching system capable of etching for aluminium Al and alloys molybdenum Mo aluminium scandium nitride AlScN thin films using medium high-density plasma processes. Lot 3 Plasma Etcher Slow and Controllable Rate Atomic Layer Etch for Silicon Dielectrics, advanced plasma etching system capable of both conventional high-rate etching and slow and controllable rate atomic layer etching for silicon Si silicon dioxide SiO2 silicon nitride SiN thin films using medium high-density plasma processes. Lot 4 Plasma Deposition PECVD, advanced plasma enhanced chemical vapour deposition system capable of depositing dielectric SiO2, SiN and amorphous a-Si thin films on semiconductor substrates. This equipment will be essential for etching and depositing a range of materials used in the fabrication of silicon microelectronics, silicon photonics and silicon MEMS devices. The ideal tools will offer precision, reliability, and efficiency to meet the requirements for etching and deposition on both 100 mm and 200 mm diameter wafers. Tenderers with cutting-edge solutions that can achieve these high standards are encouraged to submit their proposals for this vital component in our technological advancement.

Deadline

Deadline 2026-07-17

Who? What? Where?
Procurement history
Date Document
2026-06-16 Contract notice
Contract notice (2026-06-16)
Object
Scope of the procurement
Title: LA3215C-UCC-CFT for the Supply of a Suite of Plasma Etcher and Plasma Deposition Tools, 4 Lots
Short description:
Tenders are sought for the supply delivery, installation and commissioning of a suite of tools in 4 Lots for silicon-based and dielectric materials for University College Cork. The new plasma tools will enhance the capabilities at the Tyndall National Institute for the fabrication of semiconductor devices, especially silicon microelectronics and silicon MEMS, but also other materials such as germanium and silicon carbide. We invite proposals for the following lots; Lot 1 Plasma Etcher Silicon Dielectrics, advanced plasma etching system capable of etching for polysilicon poly-Si silicon dioxide SiO2 silicon nitride SiN thin films using medium high-density plasma processes. Lot 2 Plasma Etcher Metals Piezoelectrics, advanced plasma etching system capable of etching for aluminium Al and alloys molybdenum Mo aluminium scandium nitride AlScN thin films using medium high-density plasma processes. Lot 3 Plasma Etcher Slow and Controllable Rate Atomic Layer Etch for Silicon Dielectrics, advanced plasma etching system capable of both conventional high-rate etching and slow and controllable rate atomic layer etching for silicon Si silicon dioxide SiO2 silicon nitride SiN thin films using medium high-density plasma processes. Lot 4 Plasma Deposition PECVD, advanced plasma enhanced chemical vapour deposition system capable of depositing dielectric SiO2, SiN and amorphous a-Si thin films on semiconductor substrates. This equipment will be essential for etching and depositing a range of materials used in the fabrication of silicon microelectronics, silicon photonics and silicon MEMS devices. The ideal tools will offer precision, reliability, and efficiency to meet the requirements for etching and deposition on both 100 mm and 200 mm diameter wafers. Tenderers with cutting-edge solutions that can achieve these high standards are encouraged to submit their proposals for this vital component in our technological advancement.
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Type of contract: Supplies
Products/services: Laboratory, optical and precision equipments (excl. glasses) ๐Ÿ“ฆ
Estimated value excluding VAT: 3 300 000 EUR ๐Ÿ’ฐ
Information about lots
This contract is divided into lots โœ…
Tenders may be submitted for maximum number of lots: 4

1๏ธโƒฃ
Internal identifier: 1
Title: Plasma Etcher ,Silicon ,Dielectrics
Country: Ireland ๐Ÿ‡ฎ๐Ÿ‡ช
Place of performance: South-East ๐Ÿ™๏ธ
Duration: 48 months
Title
Lot Identification Number: LOT-0001

2๏ธโƒฃ
Internal identifier: 2
Title: Plasma Etcher ,Metals ,Piezoelectrics
Title
Lot Identification Number: LOT-0002

3๏ธโƒฃ
Internal identifier: 3
Title: Plasma Etcher ,Slow and Controllable Rate ,Atomic Layer Etch for Silicon , Dielectrics
Title
Lot Identification Number: LOT-0003

4๏ธโƒฃ
Internal identifier: 4
Title: Plasma Deposition ,PECVD
Title
Lot Identification Number: LOT-0004

Procedure
Type of procedure
Open procedure โœ…
Legal basis: Directive 2014/24/EU
Administrative information
Time limit for receipt of tenders or requests to participate: 2026-07-17 12:00:00 ๐Ÿ“…
Conditions for opening of tenders: 2026-07-17 12:30:00 ๐Ÿ“…
Conditions for opening of tenders (place): https://www.etenders.gov.ie/epps/cft/prepareViewCfTWS.do?resourceId=8424094
Languages in which tenders or requests to participate may be submitted: English ๐Ÿ—ฃ๏ธ
Minimum time frame during which the tenderer must maintain the tender: 180 days
Tendering terms
Tenderers may submit more than one tender
Opening date: 2026-07-17 12:30:00 ๐Ÿ“…
Place: https://www.etenders.gov.ie/epps/cft/prepareViewCfTWS.do?resourceId=8424094
Electronic invoicing: Required
Deadline for requesting additional information: 2026-07-07 12:00:00 ๐Ÿ“…

Contracting authority
Name and addresses
Name: Education Procurement Service (EPS)
National registration number: IE 6609370 G
Postal address: Castletroy Limerick
Postal code: V94 DK53
Postal town: Limerick
Region: Mid-West ๐Ÿ™๏ธ
Country: Ireland ๐Ÿ‡ฎ๐Ÿ‡ช
E-mail: info@educationprocurementservice.ie ๐Ÿ“ง
Phone: 000 ๐Ÿ“ž
URL: https://www.educationprocurementservice.ie/ ๐ŸŒ
Address of the buyer profile: https://www.educationprocurementservice.ie/ ๐ŸŒ
Type of the contracting authority
Body governed by public law
Main activity
General public services
Communication
Documents URL: https://www.etenders.gov.ie/epps/cft/listContractDocuments.do?resourceId=8424094 ๐ŸŒ
Participation URL: https://www.etenders.gov.ie/epps/cft/viewTenders.do?resourceId=8424094 ๐ŸŒ
Electronic submission: Required

Complementary information
Review body
Name: The High Court of Ireland
National registration number: The High Court of Ireland
Department: The High Court of Ireland
Postal address: Four Courts, Inns Quay, Dublin 7
Postal code: D07 WDX8
Postal town: Dublin
Region: Dublin ๐Ÿ™๏ธ
Country: Ireland ๐Ÿ‡ฎ๐Ÿ‡ช
E-mail: highcourtcentraloffice@courts.ie ๐Ÿ“ง
Phone: +353 1 8886000 ๐Ÿ“ž
Service from which information about the review procedure may be obtained
Same as: Review body
Information about electronic workflows
Electronic invoicing will be accepted
Source: OJS 2026/S 115-415187 (2026-06-16)
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