LA2972C- UCC- RFT for the Supply of a High Aspect Ratio Etcher

Education Procurement Service (EPS)

Tenders are sought for the supply delivery, installation and commissioning of a High Aspect Ratio Etcher for University College Cork. The new etcher will enhance the capabilities at the Tyndall National Institute for the advanced heterogeneous of semiconductor devices. We invite proposals for an advanced etching system capable of performing high aspect ratio silicon (Si) etching using the Bosch process. This equipment will be essential for etching deep Si trenches, facilitating the creation of through silicon vias (TSVs) that are critical for heterogeneous integration. The ideal tool will offer precision, reliability, and efficiency to meet the requirements for the etching of both 100mm and 200mm wafers. Vendors with cutting-edge solutions that can achieve these high standards are encouraged to submit their proposals for this vital component in our technological advancement.

Deadline

The time limit for receipt of tenders was 2024-08-19. The procurement was published on 2024-07-18.

Who?

• Education Procurement Service (EPS)

What?

Where?

• Eastern and Midland › Dublin

Procurement history

Date	Document
2024-07-18	Contract notice
2024-08-16	Contract notice

Contract notice (2024-07-18)
Object
Scope of the procurement
Title: LA2972C- UCC- RFT for the Supply of a High Aspect Ratio Etcher
Short description:
“Tenders are sought for the supply delivery, installation and commissioning of a High Aspect Ratio Etcher for University College Cork. The new etcher will...”
Type of contract: Supplies
Products/services: Laboratory, optical and precision equipments (excl. glasses) 📦
Estimated value excluding VAT: 900 000 EUR 💰
Information about lots
Tenders may be submitted for maximum number of lots: 0
Description
Description of the procurement:
“Tenders are sought for the supply delivery, installation and commissioning of a High Aspect Ratio Etcher for University College Cork. The new etcher will...”
Additional products/services: Electromechanical equipment 📦
Additional products/services: Electronic, electromechanical and electrotechnical supplies 📦
Place of performance: Dublin 🏙️
Title
Lot Identification Number: LOT-0001

Procedure
Type of procedure
Open procedure ✅
Administrative information
Time limit for receipt of tenders or requests to participate: 2024-08-19 12:00:00 📅
Conditions for opening of tenders: 2024-08-19 12:30:00 📅
Conditions for opening of tenders (place): https://www.etenders.gov.ie/epps/cft/prepareViewCfTWS.do?resourceId=3953747
Languages in which tenders or requests to participate may be submitted: English 🗣️

Contracting authority
Name and addresses
Name: Education Procurement Service (EPS)
National registration number: IE 6609370 G
Postal address: Castletroy Limerick
Postal code: V94 DK53
Postal town: Limerick
Country: Ireland 🇮🇪
E-mail: info@educationprocurmentservice.ie 📧
Phone: 061213506 📞
URL: https://www.educationprocurementservice.ie/ 🌏
Address of the buyer profile: https://www.educationprocurementservice.ie/ 🌏
Type of the contracting authority
Body governed by public law
Main activity
Education
Communication
Documents URL: https://www.etenders.gov.ie/epps/cft/listContractDocuments.do?resourceId=3953747 🌏
Participation URL: https://www.etenders.gov.ie/epps/cft/viewTenders.do?resourceId=3953747 🌏

Complementary information
Review body
Name: The High Court of Ireland
National registration number: The High Court of Ireland
Postal address: Four Courts, Inns Quay, Dublin 7
Postal code: D07 WDX8
Postal town: Dublin
Country: Ireland 🇮🇪
E-mail: highcourtcentraloffice@courts.ie 📧
Phone: +353 1 8886000 📞
Information about electronic workflows
Electronic invoicing will be accepted
Source: OJS 2024/S 140-435670 (2024-07-18)

Contract notice (2024-08-16)
Object
Scope of the procurement
Estimated value excluding VAT: 900 000 EUR 💰

Procedure
Administrative information
Time limit for receipt of tenders or requests to participate: 2024-09-02 12:00:00 📅
Conditions for opening of tenders: 2024-09-02 12:30:00 📅

Changes
New value
Text:
“The tender response deadline date has been changed from 19 August 2024 at 12:00 noon to 2 September 2024 at 12:00 noon”
Other additional information

“The tender response deadline date has been changed from 19 August 2024 at 12:00 noon to 2 September 2024 at 12:00 noon”
Source: OJS 2024/S 160-496638 (2024-08-16)

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