UCC — RFT a Plasma Chemical Vapour Deposition System for Compound Semiconductors for the Tyndall National Institute

Education Procurement Service (EPS)

Tenders are sought for the supply, delivery and installation of a plasma chemical vapour deposition system for compound semiconductors for the Tyndall National Institute, UCC.

Deadline

The time limit for receipt of tenders was 2019-10-14. The procurement was published on 2019-09-12.

Suppliers

The following suppliers are mentioned in award decisions or other procurement documents:

• SENTECH Instruments GmbH

Who?

• Education Procurement Service (EPS)

What?

Where?

• Ireland › Southern

Procurement history

Date	Document
2019-09-12	Contract notice
2021-01-11	Contract award notice

Contract notice (2019-09-12)
Object
Scope of the procurement
Title: Laboratory, optical and precision equipments (excl. glasses)
Reference number: LEE701C
Short description:

Tenders are sought for the supply, delivery and installation of a plasma chemical vapour deposition system for compound semiconductors for the Tyndall National Institute, UCC.

Notice metadata
Original language: English 🗣️
Document type: Contract notice
Nature of contract: Supplies
Regulation: European Union
Common procurement vocabulary (CPV)
Code: Laboratory, optical and precision equipments (excl. glasses) 📦
Additional CPV: Semiconductors 📦
Place of performance
NUTS region: Southern 🏙️

Procedure
Procedure type: Open procedure
Type of bid: Submission for all lots
Award criteria
The most economic tender

Contracting authority
Identity
Country: Ireland 🇮🇪
Awarding authority type: Body governed by public law
Awarding authority name: Education Procurement Service (EPS)
Postal address: University of Limerick, Co. Limerick
Postal town: Castletroy
Contact
Internet address: http://www.educationprocurementservice.ie 🌏
E-mail: eimear.brennan@ul.ie 📧
Phone: +353 61234901 📞
URL for documents: http://irl.eu-supply.com/app/rfq/rwlentrance_s.asp?PID=153719&B=ETENDERS_SIMPLE 🌏
URL for participation: http://irl.eu-supply.com/app/rfq/rwlentrance_s.asp?PID=153719&B=ETENDERS_SIMPLE 🌏

Reference
Dates
Date dispatched: 2019-09-12 📅
Submission deadline: 2019-10-14 📅
Publication date: 2019-09-17 📅
Identifiers
Notice number: 2019/S 179-435511
OJ-S issue: 179
Additional information
All information relating to tenders is published on www.etenders.gov.ie only.

Object
Scope of the procurement
Estimated total value: 750 000 EUR 💰
Short description:

The process and product development laboratories at Tyndall National Institute, UCC, fabricate a wide variety of semiconductor devices, ranging from traditional silicon microelectronics and Silicon MEMS to III-V photonic devices. We wish to extend our capability in the area of plasma deposition by purchasing a fully functional load locked PECVD (plasma enhanced chemical vapour deposition) or ICPCVD (Inductively coupled plasma chemical vapour deposition) system including pumps which will allow us to move our processing to a higher TRL level in terms of substrate size, deposition processes and control. The system offered must be suitable for use in a class 1 000 cleanroom. As much of the work is in the area of semiconductor R&D we have a requirement for a system that can handle substrates of varying sizes from 10 x 10 mm and various irregular shaped pieces through to 200 mm wafers, including 50 mm, 100 mm and 150 mm wafers. Due to the novel nature of the R&D and customer base we also require that the system be able to deposit a variety of film materials from dielectrics SiO2 (silicon dioxide), Si3N4 (silicon nitride) and SiOxNy (silicon oxynitride) to amorphous silicon and SiC (silicon carbide). We have defined the technical specification in terms of these specific film materials and also for the use of TEOS (Tetraethylorthosilicate) liquid precursor for conformal SiO2 deposition and the specific requirement for low temperature deposition of SiO2 and Si3N4 as well as these materials at the more standard deposition temperature of 300 C. The tenderer should also supply as part of the tender response details of the recipes to be used for cleaning when changing between deposition materials. The tender response must clearly show the costs for all items and any additional options must be clearly identified as such and costed separately. As part of

Estimated value excluding VAT: 750 000 EUR 💰
Duration: 12 months
Additional information: All information relating to tenders is published on www.etenders.gov.ie only.

Legal, economic, financial and technical information
Conditions for participation
Suitability to pursue the professional activity: Please see RFT document for further details.
Economic and financial standing: Please see RFT document for further details.
Minimum level(s) of standards: Please see RFT document for further details.
Technical and professional ability: Please see RFT document for further details.
Contract execution
Contract performance conditions: Please see RFT document for further details.

Procedure
Legal basis: 32014L0024
Time of receipt of tenders: 14:00
Languages in which tenders or requests to participate may be submitted: English 🗣️
Tender validity period: 12 months
Tender opening date: 2019-10-14 📅
Tender opening time: 14:00

Contracting authority
Identity
National registration number: IE 6609370 G
Contact
Contact point: Eimear Brennan
Address of the buyer profile: https://irl.eu-supply.com/ctm/Company/CompanyInformation/Index/87073 🌏
Documents URL: http://irl.eu-supply.com/app/rfq/rwlentrance_s.asp?PID=153719&B=ETENDERS_SIMPLE 🌏

Complementary information
Review body
Name: Office of the High Court
Postal address: Four Courts Ground Floor, Inns Quay
Postal town: Dublin
Postal code: 7
Country: Ireland 🇮🇪
Phone: +353 18886000 📞
E-mail: highcourtcentraloffice@courts.ie 📧
Source: OJS 2019/S 179-435511 (2019-09-12)

Contract award notice (2021-01-11)
Object
Notice metadata
Document type: Contract award notice

Procedure
Type of bid: Not applicable

Contracting authority
Identity
Postal address: University of Limerick, Co.Limerick

Reference
Dates
Date dispatched: 2021-01-11 📅
Publication date: 2021-01-15 📅
Identifiers
Notice number: 2021/S 010-017357
Refers to notice: 2019/S 179-435511
OJ-S issue: 10

Object
Scope of the procurement
Short description:

The Process and Product Development laboratories at Tyndall National Institute, UCC, fabricate a wide variety of semiconductor devices, ranging from traditional silicon microelectronics and Silicon MEMS to III-V photonic devices. We wish to extend our capability in the area of plasma deposition by purchasing a fully functional load locked PECVD (Plasma Enhanced Chemical Vapour Deposition) or ICPCVD (Inductively Coupled Plasma Chemical Vapour Deposition) system including pumps which will allow us to move our processing to a higher TRL level in terms of substrate size, deposition processes and control. The system offered must be suitable for use in a class 1 000 cleanroom. As much of the work is in the area of semiconductor R&D we have a requirement for a system that can handle substrates of varying sizes from 10 x 10 mm and various irregular shaped pieces through to 200 mm wafers, including 50 mm, 100 mm and 150 mm wafers. Due to the novel nature of the R&D and customer base we also require that the system be able to deposit a variety of film materials from dielectrics SiO2 (silicon dioxide), Si3N4 (silicon nitride) and SiOxNy (silicon oxynitride) to amorphous silicon and SiC (silicon carbide). We have defined the technical specification in terms of these specific film materials and also for the use of TEOS (Tetraethylorthosilicate) liquid precursor for conformal SiO2 deposition and the specific requirement for low temperature deposition of SiO2 and Si3N4 as well as these materials at the more standard deposition temperature of 300 C. The tenderer should also supply as part of the tender response details of the recipes to be used for cleaning when changing between deposition materials. The tender response must clearly show the costs for all items and any additional options must be clearly identified as such and costed separately. As part of

Procedure
Award criteria
Quality criterion (name): Technical
Quality criterion (weighting): 35 %
Quality criterion (name): Strategic agreements
Quality criterion (weighting): 5 %
Quality criterion (name): Technical support and maintenance
Quality criterion (weighting): 10 %
Quality criterion (name): Sample assessment
Price (weighting): 40 %

Award of contract
Date of contract conclusion: 2020-12-01 📅
Name: SENTECH Instruments GmbH
National registration number: DE 137 205 446
Postal address: Schwarzschildstrasse 2
Postal town: Berlin
Postal code: D-12489
Country: Germany 🇩🇪
Phone: +49 3063925525 📞
E-mail: gerd.jungmann@sentech.de 📧
Internet address: http://www.sentech.de 🌏
Information about tenders
Number of tenders received: 3

Complementary information
Review body
Postal town: Dublin 7
Source: OJS 2021/S 010-017357 (2021-01-11)

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