Sputter Deposition Tool for Trinity College Dublin

Education Procurement Service (EPS)

CRANN, TCD is seeking to procure a state-of-the-art sputter deposition tool — ‘Trifolium Dubium’ for the development of materials and thin film devices. Magnetic tunnel junctions and Heusler alloys are expected to be a major component of the research conducted using this system, as well as blanket films and stacks of novel multiferroics, magnetic and/or transparent oxides. The system will be the core of a national access facility and will be available for use by a large number of research groups in both academia and industry, and as such performance and flexibility are paramount.
The requirement will be divided into three (3) Lots. It would be envisaged that the three (3) lots will be broken down as follows:
Lot 1: Sputter Chamber #1;
Lot 2: XPS Chamber;
Lot 3: Water Transfer System Arrangement and Vacuum.

Deadline

The time limit for receipt of tenders was 2016-07-13. The procurement was published on 2016-06-10.

Who?

• Education Procurement Service (EPS)

What?

Where?

• Dublin
• Mid-West

Procurement history

Date	Document
2016-06-10	Contract notice
2016-06-21	Additional information

Contract notice (2016-06-10)
Object
Scope of the procurement
Title: Laboratory, optical and precision equipments (excl. glasses)
Reference number: LEE091C
Short description:

CRANN, TCD is seeking to procure a state-of-the-art sputter deposition tool — ‘Trifolium Dubium’ for the development of materials and thin film devices. Magnetic tunnel junctions and Heusler alloys are expected to be a major component of the research conducted using this system, as well as blanket films and stacks of novel multiferroics, magnetic and/or transparent oxides. The system will be the core of a national access facility and will be available for use by a large number of research groups in both academia and industry, and as such performance and flexibility are paramount. The requirement will be divided into three (3) Lots. It would be envisaged that the three (3) lots will be broken down as follows: Lot 1: Sputter Chamber #1; Lot 2: XPS Chamber; Lot 3: Water Transfer System Arrangement and Vacuum.

Notice metadata
Original language: English 🗣️
Document type: Contract notice
Nature of contract: Supplies
Regulation: European Union
Common procurement vocabulary (CPV)
Code: Laboratory, optical and precision equipments (excl. glasses) 📦
Additional CPV: Geological and geophysical instruments 📦
Place of performance
NUTS region: Dublin 🏙️

Procedure
Procedure type: Restricted procedure
Type of bid: Submission for all lots
Award criteria
The most economic tender

Contracting authority
Identity
Country: Ireland 🇮🇪
Awarding authority type: Body governed by public law
Awarding authority name: Education Procurement Service (EPS)
Postal address: University of Limerick, Plassey, Co. Limerick
Postal town: Limerick
Contact
Internet address: http://www.ul.ie/edps 🌏
E-mail: philip.gurnett@ul.ie 📧
Phone: +353 61213488 📞
URL for documents: http://irl.eu-supply.com/app/rfq/rwlentrance_s.asp?PID=99804&B=ETENDERS_SIMPLE 🌏
URL for participation: http://irl.eu-supply.com/app/rfq/rwlentrance_s.asp?PID=99804&B=ETENDERS_SIMPLE 🌏

Reference
Dates
Date dispatched: 2016-06-10 📅
Submission deadline: 2016-07-13 📅
Publication date: 2016-06-14 📅
Identifiers
Notice number: 2016/S 113-200771
OJ-S issue: 113
Additional information
Sputter Deposition Tool for TCD required. See PQQ for details.

Object
Scope of the procurement
Short description:

The requirement will be divided into three (3) Lots. It would be envisaged that the three (3) lots will be broken down as follows:

Lot 1: Sputter Chamber #1;

Lot 2: XPS Chamber;

Lot 3: Water Transfer System Arrangement and Vacuum.

Estimated total value: 3 240 000 EUR 💰
Maximum number of lots per tenderer: 3
Title of the lot: Sputter Chamber 1 — Deposition System
Lot number: 1
Short description:

The base tool would be split into 2 chambers connected via a vacuum transfer system. The tool would be a fully integrated system, with all chambers interconnected under vacuum with wafer transfer between chambers for subsequent processing steps. The tool should be capable of co-deposition of various materials with low roughness and good uniformity across 4” (100 mm) diameter substrates, including at high temperatures. 1 chamber would be used primarily for deposition of metals, while the other would be designed for deposition of oxides and nitrides, including reactive processes involving the introduction of oxygen and/or nitrogen into the chamber.

Additional deposition chambers such as for pulsed laser deposition (PLD) and molecular beam epitaxy (MBE) are considered, as well. These are to be fully integrated into the vacuum transfer system above. As such, a suitable Nd: YAG laser is potentially required for PLD. Finally, in an attempt to improve the in situ characterisation capabilities, a dedicated, wafer compatible X-ray photo-electron spectroscopy (XPS) analytics chamber is also considered.

Duration: 36 months
Name of EU-financed project or programme: SFI-Funding Contribution.
Additional information: Sputter Deposition Tool for TCD required. See PQQ for details.
Title of the lot: Photo-electron Spectroscopy Analysis Chamber
Lot number: 2
Title of the lot: PLD Laser and Optics
Lot number: 3
Place of performance
Main site or place of performance: Dublin, Ireland.

Legal, economic, financial and technical information
Conditions for participation
Suitability to pursue the professional activity: See LEE091C PQQ document for details.
Economic and financial standing: See LEE091C PQQ document for details.
Minimum level(s) of standards: See LEE091C PQQ document for details.
Technical and professional ability: See LEE091C PQQ document for details.

Procedure
Minimum number of candidates: 2
Maximum number of candidates: 5
Objective criteria for choosing the limited number of candidates:

Previous Experience:

Profile of staff members along with CV's;

Quality Assurance.

Time of receipt of tenders: 14:00
Date of dispatch of invitations: 2016-08-19 📅
Languages in which tenders or requests to participate may be submitted: English 🗣️
Tender validity period: 36 months

Contracting authority
Identity
National registration number: IE 6609370 G
Contact
Contact point: Philip Gurnett
Address of the buyer profile: https://irl.eu-supply.com/ctm/Company/CompanyInformation/Index/87073 🌏
Documents URL: http://irl.eu-supply.com/app/rfq/rwlentrance_s.asp?PID=99804&B=ETENDERS_SIMPLE 🌏

Complementary information
Review body
Name: Central Office of the High Court
Postal address: Four Courts, Inns Quay
Postal town: Dublin
Postal code: 7
Country: Ireland 🇮🇪
Source: OJS 2016/S 113-200771 (2016-06-10)

Additional information (2016-06-21)
Object
Scope of the procurement
Short description:

CRANN, TCD is seeking to procure a state-of-the-art sputter deposition tool — ‘Trifolium Dubium’ for the development of materials and thin film devices. Magnetic tunnel junctions and Heusler alloys are expected to be a major component of the research conducted using this system, as well as blanket films and stacks of novel multiferroics, magnetic and/or transparent oxides. The system will be the core of a national access facility and will be available for use by a large number of research groups in both academia and industry, and as such performance and flexibility are paramount. The requirement will be divided into three (3) Lots. It would be envisaged that the three (3) lots will be broken down as follows: Lot 1: Deposition Chambers and Wafer Transfer System Lot 2: XPS Chamber Lot 3: Laser for PLD chamber.

Notice metadata
Document type: Additional information

Reference
Dates
Date dispatched: 2016-06-21 📅
Publication date: 2016-06-25 📅
Identifiers
Notice number: 2016/S 121-214926
Refers to notice: 2016/S 113-200771
OJ-S issue: 121

Object
Scope of the procurement
Short description:

Lot 1: Deposition Chambers and Wafer Transfer System

Lot 2: XPS Chamber

Lot 3: Laser for PLD chamber.

Source: OJS 2016/S 121-214926 (2016-06-21)

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