Provision of an Automated Resist and Developement Tool
The Process & Product development laboratories at Tyndall National Institute, UCC, fabricate a wide variety of Semiconductor devices, ranging from traditional silicon microelectronics to Silicon MEMS to photonic devices. Photolithography is a key component in device fabrication and we are looking for a system for the application of photoresist and other polymer coatings to substrates and the development of patterns post exposure.
Deadline
The time limit for receipt of tenders was 2015-12-07.
The procurement was published on 2015-11-26.
Suppliers
The following suppliers are mentioned in award decisions or other procurement documents:
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Procurement history
| Date |
Document |
| 2015-11-26
|
Contract notice
|
| 2016-05-10
|
Contract award notice
|