Provision of a Silicon Etch System

University College Cork (UCC)

Due to the high rate of utilisation of the present MEMS Silicon etch system at Tyndall, a requirement has been identified to source a second deep silicon etch system for MEMS applications (Microsystems Fabrication) in the CFF. This system must match or enhance the current Silicon Etch capabilities at Tyndall.
The system must be versatile and allow for upgrades as our needs change. In addition, ongoing commitment to support process development projects, as well as prompt field service support must be guaranteed.
To assist potential vendors, Tyndall has drawn up the following process and mechanical specifications for this machine, which are considered as targets to be achieved by the manufacturer. The specifications detailed in this document are for functional deep silicon etch system capable of anisotropic through-wafer etching.
NOTE: To register your interest in this notice and obtain any additional information please visit the eTenders Web Site at http://www.etenders.gov.ie/Search/Search_Switch.aspx?ID=435452. />The awarding authority has indicated that it will accept electronic responses to this notice via a 'Tender Submission Postbox' facility. Further details of this facility are available at http://www.etenders.gov.ie/PostBox/Postbox_Explain.aspx?ID=435452. />Suppliers are advised to allow adequate time for uploading documents and to dispatch the electronic response well in advance of the closing time to avoid any last minute problems. The postbox closes precisely at the time stated.

Deadline

The time limit for receipt of tenders was 2012-06-18. The procurement was published on 2012-05-24.

Suppliers

The following suppliers are mentioned in award decisions or other procurement documents:

 Who? What? Where?
Procurement history
Date Document
2012-05-24 Contract notice
2013-07-10 Contract award notice
Contract notice (2012-05-24)
Object
Scope of the procurement
Title: miscellaneous equipment
Quantity or scope: Refer to invitation to tender document.
Notice metadata
Original language: English 🗣️
Document type: Contract notice
Nature of contract: Supplies
Regulation: European Union, with participation of GPA countries
Common procurement vocabulary (CPV)
Code: Miscellaneous equipment 📦

Procedure
Procedure type: Open procedure
Type of bid: Submission for all lots
Award criteria
The most economic tender

Contracting authority
Identity
Country: Ireland 🇮🇪
Awarding authority type: Body governed by public law
Awarding authority name: University College Cork (UCC)
Postal address: 6 Elderwood, College Rd
Postal town: Cork
Contact
Internet address: http://www.ucc.ie 🌏
E-mail: procurement@fin.ucc.ie 📧
Phone: +353 214903514 📞
Fax: +353 214903535 📠

Reference
Dates
Date dispatched: 2012-05-24 📅
Submission deadline: 2012-06-18 📅
Publication date: 2012-05-30 📅
Identifiers
Notice number: 2012/S 101-167955
Refers to notice: 2012/S 6-008923
OJ-S issue: 101
Additional information
(ET Ref:435452).

Object
Scope of the procurement
Short description:
Due to the high rate of utilisation of the present MEMS Silicon etch system at Tyndall, a requirement has been identified to source a second deep silicon etch system for MEMS applications (Microsystems Fabrication) in the CFF. This system must match or enhance the current Silicon Etch capabilities at Tyndall.
Show more
The system must be versatile and allow for upgrades as our needs change. In addition, ongoing commitment to support process development projects, as well as prompt field service support must be guaranteed.
To assist potential vendors, Tyndall has drawn up the following process and mechanical specifications for this machine, which are considered as targets to be achieved by the manufacturer. The specifications detailed in this document are for functional deep silicon etch system capable of anisotropic through-wafer etching.
Show more
NOTE: To register your interest in this notice and obtain any additional information please visit the eTenders Web Site at http://www.etenders.gov.ie/Search/Search_Switch.aspx?ID=435452.
The awarding authority has indicated that it will accept electronic responses to this notice via a 'Tender Submission Postbox' facility. Further details of this facility are available at http://www.etenders.gov.ie/PostBox/Postbox_Explain.aspx?ID=435452.
Show more
Suppliers are advised to allow adequate time for uploading documents and to dispatch the electronic response well in advance of the closing time to avoid any last minute problems. The postbox closes precisely at the time stated.
Variants will be accepted ✅
Reference number: UCC 2012/27
Name of EU-financed project or programme: PRTLI 5 funds.
Place of performance
Main site or place of performance: University College Cork.

Legal, economic, financial and technical information
Conditions for participation
Suitability to pursue the professional activity:
(1) All candidates will be required to produce a certificate or declaration demonstrating that they are not bankrupt or the subject of an administration order, are not being wound-up, have not granted a trust deed, are not the subject of a petition presented for sequestration of their estate, have not had a receiver, manager or administrator appointed and are not otherwise apparently insolvent.
Show more
Refer to Invitation to Tender document.
Economic and financial standing:
(1) All candidates will be required to provide a statement, covering the 3 previous financial years including the overall turnover of the candidate and the turnover in respect of the activities which are of a similar type to the subject matter of this notice.
Show more
(2) All candidates will be required to provide statements of accounts or extracts from those accounts relating to their business.
Refer to Invitation to Tender document.
Technical and professional ability: Refer to Invitation to Tender document.
Contract execution
Main financing conditions and payment arrangements and/or reference to the relevant provisions governing them: Refer to Tender document.
Legal form to be taken by the group of economic operators to whom the contract is to be awarded: Refer to Tender document.

Procedure
Tender validity period: 6 months
Tender opening date: 2012-06-18 📅
Place of opening: E-tenders
Place: E-tenders
Languages
Language: English 🗣️

Contracting authority
Contact
Contact point: Procurement
Sean Barry
Address of the buyer profile: http://www.etenders.gov.ie/search/Search_AuthProfile.aspx?ID=AA01797 🌏
Name: University College Cork (UCC)
Contact point: Procurement & Contracts
URL for further information: http://www.ucc.ie 🌏
URL for documents: http://www.ucc.ie 🌏
URL for participation: http://www.ucc.ie 🌏

Reference
Dates
Publication date: 2012-01-11 📅
Identifiers
Reference number attributed by the contracting authority: UCC 2012/27
Notice number in the OJ S: 2012/S 6-008923
Source: OJS 2012/S 101-167955 (2012-05-24)
Contract award notice (2013-07-10)
Object
Scope of the procurement
Title: Miscellaneous equipment
Notice metadata
Document type: Contract award notice
Nature of contract: Works

Procedure
Type of bid: Not applicable

Reference
Dates
Date dispatched: 2013-07-10 📅
Publication date: 2013-07-12 📅
Identifiers
Notice number: 2013/S 134-231538
Refers to notice: 2012/S 101-167955
OJ-S issue: 134
Additional information
V.4) Information on value of contract Initial estimated total value of the contract Currency: EUR Excluding VAT Total final value of the contract Currency: EUR Excluding VAT

Object
Scope of the procurement
Reference number: UCC/2012/27

Procedure
Award criteria
Criterion: 1. Cost (35)
2. Technical merit (40)
3. Technical support and maintenance (20)
4. Delivery (5)

Award of contract
Date of contract conclusion: 2013-02-08 📅
Name: Oxford Instruments Plasma Technology
Postal address: North End, Yatton
Postal town: Bristol
Postal code: BS49 4AP
Country: United Kingdom 🇬🇧
Internet address: http://www.oxford-instruments.com 🌏
Information about tenders
Number of tenders received: 3

Contracting authority
Contact
Contact point: Procurement & Contracts Office (UCC)
Source: OJS 2013/S 134-231538 (2013-07-10)
New procurements in related categories 🆕
Related searches 🔍
Products/services:
Laboratory, optical and precision... Furniture (incl. office furniture),... Miscellaneous equipment