Provision of a Silicon Etch System

University College Cork (UCC)

Due to the high rate of utilisation of the present MEMS Silicon etch system at Tyndall, a requirement has been identified to source a second deep silicon etch system for MEMS applications (Microsystems Fabrication) in the CFF. This system must match or enhance the current Silicon Etch capabilities at Tyndall.
The system must be versatile and allow for upgrades as our needs change. In addition, ongoing commitment to support process development projects, as well as prompt field service support must be guaranteed.
To assist potential vendors, Tyndall has drawn up the following process and mechanical specifications for this machine, which are considered as targets to be achieved by the manufacturer. The specifications detailed in this document are for functional deep silicon etch system capable of anisotropic through-wafer etching.
NOTE: To register your interest in this notice and obtain any additional information please visit the eTenders Web Site at http://www.etenders.gov.ie/Search/Search_Switch.aspx?ID=435452. />The awarding authority has indicated that it will accept electronic responses to this notice via a 'Tender Submission Postbox' facility. Further details of this facility are available at http://www.etenders.gov.ie/PostBox/Postbox_Explain.aspx?ID=435452. />Suppliers are advised to allow adequate time for uploading documents and to dispatch the electronic response well in advance of the closing time to avoid any last minute problems. The postbox closes precisely at the time stated.

Deadline

The time limit for receipt of tenders was 2012-06-18. The procurement was published on 2012-05-24.

Suppliers

The following suppliers are mentioned in award decisions or other procurement documents:

Who? What? Where?
Procurement history
Date Document
2012-05-24 Contract notice
2013-07-10 Contract award notice
Contract notice (2012-05-24)
Object
Scope of the procurement
Title: miscellaneous equipment
Quantity or scope:
โ€œRefer to invitation to tender document.โ€
Notice metadata
Original language: English ๐Ÿ—ฃ๏ธ
Document type: Contract notice
Nature of contract: Supplies
Regulation: European Union, with participation of GPA countries
Common procurement vocabulary (CPV)
Code: Miscellaneous equipment ๐Ÿ“ฆ

Procedure
Procedure type: Open procedure
Type of bid: Submission for all lots
Award criteria
The most economic tender

Contracting authority
Identity
Country: Ireland ๐Ÿ‡ฎ๐Ÿ‡ช
Awarding authority type: Body governed by public law
Awarding authority name: University College Cork (UCC)
Postal address: 6 Elderwood, College Rd
Postal town: Cork
Contact
Internet address: http://www.ucc.ie ๐ŸŒ
E-mail: procurement@fin.ucc.ie ๐Ÿ“ง
Phone: +353 214903514 ๐Ÿ“ž
Fax: +353 214903535 ๐Ÿ“ 

Reference
Dates
Date dispatched: 2012-05-24 ๐Ÿ“…
Submission deadline: 2012-06-18 ๐Ÿ“…
Publication date: 2012-05-30 ๐Ÿ“…
Identifiers
Notice number: 2012/S 101-167955
Refers to notice: 2012/S 6-008923
OJ-S issue: 101
Additional information

โ€œ(ET Ref:435452).โ€

Object
Scope of the procurement
Short description:
โ€œDue to the high rate of utilisation of the present MEMS Silicon etch system at Tyndall, a requirement has been identified to source a second deep silicon...โ€    Show more

โ€œThe system must be versatile and allow for upgrades as our needs change. In addition, ongoing commitment to support process development projects, as well as...โ€    Show more
Show more (4)
โ€œTo assist potential vendors, Tyndall has drawn up the following process and mechanical specifications for this machine, which are considered as targets to...โ€    Show more

โ€œNOTE: To register your interest in this notice and obtain any additional information please visit the eTenders Web Site at...โ€    Show more

โ€œThe awarding authority has indicated that it will accept electronic responses to this notice via a 'Tender Submission Postbox' facility. Further details of...โ€    Show more

โ€œSuppliers are advised to allow adequate time for uploading documents and to dispatch the electronic response well in advance of the closing time to avoid...โ€    Show more
Variants will be accepted โœ…
Reference number: UCC 2012/27
Name of EU-financed project or programme:
โ€œPRTLI 5 funds.โ€
Place of performance
Main site or place of performance:
โ€œUniversity College Cork.โ€

Legal, economic, financial and technical information
Conditions for participation
Suitability to pursue the professional activity:
โ€œ(1) All candidates will be required to produce a certificate or declaration demonstrating that they are not bankrupt or the subject of an administration...โ€    Show more

โ€œRefer to Invitation to Tender document.โ€
Economic and financial standing:
โ€œ(1) All candidates will be required to provide a statement, covering the 3 previous financial years including the overall turnover of the candidate and the...โ€    Show more

โ€œ(2) All candidates will be required to provide statements of accounts or extracts from those accounts relating to their business.โ€
Show more (1)
โ€œRefer to Invitation to Tender document.โ€
Technical and professional ability:
โ€œRefer to Invitation to Tender document.โ€
Contract execution
Main financing conditions and payment arrangements and/or reference to the relevant provisions governing them:
โ€œRefer to Tender document.โ€
Legal form to be taken by the group of economic operators to whom the contract is to be awarded:
โ€œRefer to Tender document.โ€

Procedure
Tender validity period: 6 months
Tender opening date: 2012-06-18 ๐Ÿ“…
Place of opening:
โ€œE-tendersโ€
Place: E-tenders
Languages
Language: English ๐Ÿ—ฃ๏ธ

Contracting authority
Contact
Contact point: Procurement
Sean Barry
Address of the buyer profile: http://www.etenders.gov.ie/search/Search_AuthProfile.aspx?ID=AA01797 ๐ŸŒ
Name: University College Cork (UCC)
Postal address: 6 Elderwood, College Rd
Postal town: Cork
Country: Ireland ๐Ÿ‡ฎ๐Ÿ‡ช
Contact point: Procurement & Contracts
URL for further information: http://www.ucc.ie ๐ŸŒ
URL for documents: http://www.ucc.ie ๐ŸŒ
URL for participation: http://www.ucc.ie ๐ŸŒ

Reference
Dates
Publication date: 2012-01-11 ๐Ÿ“…
Identifiers
Reference number attributed by the contracting authority: UCC 2012/27
Notice number in the OJ S: 2012/S 6-008923
Source: OJS 2012/S 101-167955 (2012-05-24)
Contract award notice (2013-07-10)
Object
Scope of the procurement
Title: Miscellaneous equipment
Notice metadata
Document type: Contract award notice
Nature of contract: Works

Procedure
Type of bid: Not applicable

Reference
Dates
Date dispatched: 2013-07-10 ๐Ÿ“…
Publication date: 2013-07-12 ๐Ÿ“…
Identifiers
Notice number: 2013/S 134-231538
Refers to notice: 2012/S 101-167955
OJ-S issue: 134
Additional information

โ€œV.4) Information on value of contract Initial estimated total value of the contract Currency: EUR Excluding VAT Total final value of the...โ€    Show more

Object
Scope of the procurement
Reference number: UCC/2012/27

Procedure
Award criteria
Criterion: 1. Cost (35)
2. Technical merit (40)
3. Technical support and maintenance (20)
4. Delivery (5)

Award of contract
Date of contract conclusion: 2013-02-08 ๐Ÿ“…
Name: Oxford Instruments Plasma Technology
Postal address: North End, Yatton
Postal town: Bristol
Postal code: BS49 4AP
Country: United Kingdom ๐Ÿ‡ฌ๐Ÿ‡ง
Internet address: http://www.oxford-instruments.com ๐ŸŒ
Information about tenders
Number of tenders received: 3

Contracting authority
Contact
Contact point: Procurement & Contracts Office (UCC)
Source: OJS 2013/S 134-231538 (2013-07-10)